BOARD DELIVERY UNIT AND WET TREATMENT DEVICE USIGN THE SAME

摘要

PROBLEM TO BE SOLVED: To easily set a user-desired process by reducing a device length and facilitate the change in the treatment process involved in specification change. SOLUTION: A first board treatment unit 200 for etching, a second board treatment unit 200' for rinse dry and a double cleaning unit 300 are arranged around a board delivery unit 100, which delivers a board 600 to a periphery. The board delivery unit 100 has a plurality of hand parts arranged vertically in a plurality of steps and prevents the contamination of the board 600 through a hand part.