| 摘要 |
PROBLEM TO BE SOLVED: To avoid troubles due to the distortion of a substrate by providing support members for supporting the substrate; the member having a pair of outer supports for supporting the outside of the substrate and one inner support disposed between the outer supports. SOLUTION: An upper and lower substrate support members 43a, 43b independently movable horizontally along a base are provided and form a top end part 51 for mounting a substrate G and base 52. The top end part 51 forms a pair of relatively short outer supports 53 for supporting the outer edge of the substrate G and a pair of relatively long inner supports 54 inside the outer supports 53. Six guide members 55 are provided; one each on the top end faces of the outer and inner supports 53, 54 and two on the base 52. This avoids distorting the substrate G.
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