发明名称 MANUFACTURE OF INTEGRATED SOLAR CELL
摘要 PROBLEM TO BE SOLVED: To prevent a glass substrate from breaking by, as a first electrode layer, forming a transparent conductive film on the glass substrate, forming a division line of the first electro layer by laser scribing, and thermally treating at a specified temperature. SOLUTION: On a soda lime glass substrate 1, a transparent conductive film of fluorine-doped tin oxide is deposited on a first electrode layer 2, and for aiming integration, the first electrode layer 2 is, corresponding to a plurality of power generating regions, melted at light angle to integration direction by laser scribing method to form a separation groove 6. After that, the process is performed at 300 deg.C or above, preferably, in the range 400-500 deg.C. Below 300 deg.C, drop of the glass strength of substrate can not be suppressed, while, within 300-400 deg.C, such long period as 20 hours or more is required to be restored to the strength of the first electro layer before division by laser scribing, and an in-plane strength can be raised most in a short period at 400-500 deg.C, preventing the glass substrate from breaking.
申请公布号 JPH1126797(A) 申请公布日期 1999.01.29
申请号 JP19970173546 申请日期 1997.06.30
申请人 KANEGAFUCHI CHEM IND CO LTD 发明人 HAYASHI KATSUHIKO
分类号 H01L31/042;H01L31/04 主分类号 H01L31/042
代理机构 代理人
主权项
地址