PARTICLE BEAM DETECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a particle beam detecting device which is low in a noise level and improved in performance reproducibility by using an STJ (superconducting tunnel junction) element. SOLUTION: On a substrate 10 having an opening 11 and wiring layers 12a-12d made of a superconducting material, a chip 20 on which an STJ element array used as a particle beam detector is integrated and a chip 30 on which a signal processing circuit composed of an SQUID(superconducting quantum interference device), a superconducting ADC, etc., is integrated are connected to each other in a hybrid state by flip chip bonding. The chip 20 is mounted so that the STJ element array may be faced to the opening 11 and the chip 30 is covered with a box-like shielding body 60 made of a superconducting material. A particle beam made incident on the STJ element through the opening 11 of the substrate 10 are detected by only impressing a magnetic field upon the chip 20.