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经营范围
发明名称
METHOD AND APPARATUS OF CLEANING AND DRYING TREATMENT
摘要
申请公布号
JPH1126420(A)
申请公布日期
1999.01.29
申请号
JP19970195060
申请日期
1997.07.04
申请人
TOKYO ELECTRON LTD
发明人
KAMIKAWA YUJI
分类号
F26B7/00;H01L21/304;(IPC1-7):H01L21/304
主分类号
F26B7/00
代理机构
代理人
主权项
地址
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