METHOD OF TESTING SEMICONDUCTOR WAFER DEVICE,申请号JP19970196437-传众专利搜索

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发明名称	METHOD OF TESTING SEMICONDUCTOR WAFER DEVICE
摘要
申请公布号	JPH1126537(A)	申请公布日期	1999.01.29
申请号	JP19970196437	申请日期	1997.07.07
申请人	NEC CORP	发明人	MAEDA TETSUNORI
分类号	G01R11/22;G01R31/3185;G06F11/22;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01R11/22
代理机构		代理人
主权项
地址

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