| 摘要 |
PROBLEM TO BE SOLVED: To provide a protection film for an electroluminescent element with less performance drop caused by heat or stress, high gas barrier capability, and high transparency by forming a diamond-like carbon film having the specified hydrogen content and oxygen content on at least one side of a transparent film. SOLUTION: A diamond-like carbon film having a hydrogen content of 50 atomic percent or less, preferably 45 atomic percent or less, more preferably 40 atomic percent or less and an oxygen content of 2-20 atomic percent, preferably 2-15 atomic percent, more preferably 2-10 atomic percent is formed on at least one side of a transparent film. As the transparent film, a film such as polyethylene terephthalate having not so high glass transition temperature, a light transmission of 85% or more, smooth surface, and a thickness of 0.01-1 mm is preferable. The diamond-like carbon film is prepared by using a raw material gas containing methane, carbon monoxide, or the like and by plasma CVD, and preferable to have a thickness of about 0.5μm or less.
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