| 摘要 |
<p>PROBLEM TO BE SOLVED: To find the chemical bonding state or the existing ratio of elements in the surface layer of a sample accurately by finding the electronic spectrum of the sample through a time-of-flight method and then performing signal processing using the photoelectron spectrum of the sample as a reference spectrum. SOLUTION: A micro-region of a sample 111 on a moving stage 112 is irradiated with X-rays 108 from a plasma 107. Discharged photoelectrons 113 are passed through a flight tube 114 and detected by means of a micro-channel plate 116. Since the energy distribution of photoelectron is analyzed from the flight time distribution during that interval, the photoelectron distribution can be obtained at once over the entire energy range. A detected waveform of photoelectron is quantized and delivered to a processing section 118 and subjected to data processing. More specifically, a single electronic spectrum, an existing ratio, and the like, corresponding to an interesting chemical bonding state or an element are found through processing using a photoelectron spectrum, obtained from a region containing a plurality of chemical bonding states or elements purely or from another standard element, as a reference electronic spectrum.</p> |
