| 摘要 |
<p>PROBLEM TO BE SOLVED: To simply analyze a micro-object on a sample in a short time. SOLUTION: A micro-object analyzing apparatus 1 comprises an XY stage 3, an optical unit 4, a scanning electron gun 5, an X-ray detector 6, and a secondary electronic detector 7 which are stored in a vacuum container 1a. A laser module 10 including at least a laser light source and an optical system, and a photodetector 12 detecting a scattering light from a sample are mounted to a main body stage 11, thereby constituting the optical unit 4. The optical unit is detachably set to the vacuum container 1a.</p> |
