COMPACT MICROWAVE DOWNSTREAM PLASMA SYSTEM

摘要

A compact microwave dowstream plasma system includes, within a significantly small portable housing unit, a power supply, a microwave generator, a non-linear wave guide, a circulator, a dummy load, a plasma applicator, and an igniter. The microwave generator supplies microwaves to the guide to the applicator. The guide includes several curved regions that allow for a more compact design. The applicator is configured to generate a plasma and output reactants that can be used to remove photoresist layers from a wafer within a process reactor.