Turbo-molecular pump with magnetic rotor bearing

摘要

The pump has a rotor which is supported by a magnetic bearing (3), coupled to a magnetic bearing control (8). The magnetic bearing control has a programmable digital processor (7), incorporated within the pump control (2). The magnetic bearing is controlled in dependence on the position of the rotor, provided by a position detector (4). The programmable digital processor is also used for controlling a heating device (5), in dependence on the signal from a temperature detector (6).