PROBE STATION ADAPTER FOR BACKSIDE EMISSION INSPECTION

摘要

A silicon wafer tester comprises an adapter (24) for holding a silicon wafer in an inverted position in a probe station (10) to allow backside emission testing through an opening in the wafer carrier while the wafer is energized and probed from beneath. A special probe card holder (25) is provided with a self-leveling feature by means of a leveling frame comprising a pair of side rails (80, 82) on the probe card holder cooperating with the wafer carrier.