SCANNING MICROSCOPE WITH MINIATURE HEAD

摘要

The present invention provides a scanning microscope including: (1) a light source for supply of a light beam; (2) optical transmission means for transmitting the light beam from an entry end thereof proximate the light source to an exit end thereof proximate light focusing means, the light focusing means focusing the light emerging from the exit end to illuminate a point observation field on or within an object to be examined; (3) a detector to detect object emanated light emerging from the point observation field; (4) a scanner mounted in an optical head casing with the light focusing means, to cause the illuminated point observation field to scan over a two-dimensional cross section of the object such that an image of the object emanated light received by the detector over the cross section may be constructed; wherein the scanner includes counterbalancing elements to balance reactive forces caused by operation of the scanner, such that vibration of the light focusing means caused by coupling of the reactive forces to the light focusing means is reduced.