| 摘要 |
A probe station includes a gas containment chamber for controlling the environment during probing of a device on a movable chuck support (92) which is positioned by motors generating EMI radiation which interferes with probe measurements. A set of overlapping plates (96, 98, 100, 102) shield the device under test from EMI radiation, but include ports (106) which permit free flow of dry nitrogen from a source through the chamber. The ports are dimensioned so as not to impede the EMI shielding by the plates. The dry nitrogen flows continuously from the chamber and is maintained at a pressure slightly above atmospheric.
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