LAMINATED SEMICONDUCTOR SUBSTRATE AND ITS MANUFACTURING METHOD,申请号JP19970182572-传众专利搜索

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发明名称	LAMINATED SEMICONDUCTOR SUBSTRATE AND ITS MANUFACTURING METHOD
摘要
申请公布号	JPH1126336(A)	申请公布日期	1999.01.29
申请号	JP19970182572	申请日期	1997.07.08
申请人	SUMITOMO METAL IND LTD	发明人	TOMITA SHINICHI
分类号	H01L21/304;H01L21/02;H01L27/12;(IPC1-7):H01L21/02	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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