Flow rate measurement element for volumetric flow sensor

摘要

The measurement element has a flat substrate with an opening in the form of a gap (18) on one of its side faces. A heater resistor (4) and two temperature measurement resistors (5,6) positioned either side of it are located in a sensor section. These are enclosed between an insulating carrier film and an insulating protective film (3). The sensor section is arranged in parallel with one surface of the substrate. One end of the carrier film is held by the substrate so that it is located in the gap. The sensor section does not come into contact with the substrate. A thin film heat conduction component (11) is located between the heater resistance and the temperature measurement resistors and has a thermal conductivity higher than that of either the carrier film or the protective film.