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发明名称
Röntgenbelichtungsvorrichtung
摘要
申请公布号
DE69130009(T2)
申请公布日期
1999.01.28
申请号
DE19916030009T
申请日期
1991.06.13
申请人
CANON K.K., TOKIO/TOKYO, JP
发明人
EBINUMA, RYUICHI, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP
分类号
G03F7/20;H01L21/027;H05G2/00;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
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