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发明名称
摘要
申请公布号	JP2850888(B2)	申请公布日期	1999.01.27
申请号	JP19960300103	申请日期	1996.11.12
申请人	NIPPON DENKI KK	发明人	UEDA YUTAKA
分类号	H01L21/28;H01L21/311;H01L21/3205;H01L21/331;H01L21/768;H01L29/73;H01L29/732;(IPC1-7):H01L21/768	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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