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发明名称
End station for a parallel beam ion implanter
摘要
申请公布号
EP0559360(B1)
申请公布日期
1999.01.27
申请号
EP19930301298
申请日期
1993.02.23
申请人
EATON CORPORATION
发明人
BRUNE, ROBERT ALLEN;SMITH, DORSEY TAYLOR;RAY, ANDREW MARLOW
分类号
C23C14/48;H01J37/20;H01J37/317;H01L21/265;(IPC1-7):H01L21/00
主分类号
C23C14/48
代理机构
代理人
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地址
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