| 摘要 |
<p>A position sensing mark is provided on an object whose position is to be measured. The position sensing mark comprises a predetermined reference point and a plurality of mark elements including information on positions relative to the reference point. At least one mark element is detected by a detector and, in accordance with the detected mark element, the relative position of the detection origin of the detector relative to the reference point is found and, in accordance with the relative position, the position of the object relative to the detection origin of the detector is found.</p> |
