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发明名称
RELEASE FILM HAVING SLIGHT CONTAMINATING PROPERTY
摘要
申请公布号
JPH1120105(A)
申请公布日期
1999.01.26
申请号
JP19970175627
申请日期
1997.07.01
申请人
TEIJIN LTD
发明人
MORIMOTO SACHIRO
分类号
B32B27/00;B32B27/30;B32B27/36;B32B27/42;H01L21/304;(IPC1-7):B32B27/36
主分类号
B32B27/00
代理机构
代理人
主权项
地址
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