| 摘要 |
PROBLEM TO BE SOLVED: To dispense with gas introduction from the outside at the initial time of the vacuum breakage, to suppress generation of a turbulence, and to stably and safely perform the slow vent of a vacuum chamber. SOLUTION: A substance to generate the gas by the external force is introduced in a vacuum device which is kept in the vacuum condition, the electric or thermal signal is controlled so that the external force is exerted on the substrate, and a trace of gas is generated. The stable vent can be achieved without generating the turbulence caused by the introduction of the gas from the outside in the initial condition of the vacuum breakage of the vacuum device. This prevents the reaction product grown on an inner wall from being peeled and scattered by the impact by the turbulence, and polluting the sample introduced in the device. The pressure in the vacuum device can be controlled by the generated amount of the gas. The substances capable of generating the gas include silanol to generate the steam by controlling the thermal signal, and the liquid molecules to generate the electrolysis by the electric signal. |
