DEVICE FOR PROCESSING SUBSTRATE,申请号JP19970174067-传众专利搜索

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发明名称	DEVICE FOR PROCESSING SUBSTRATE
摘要
申请公布号	JPH1119605(A)	申请公布日期	1999.01.26
申请号	JP19970174067	申请日期	1997.06.30
申请人	DAINIPPON SCREEN MFG CO LTD	发明人	SATO SEIICHIRO
分类号	B08B3/04;H01L21/304;(IPC1-7):B08B3/04	主分类号	B08B3/04
代理机构		代理人
主权项
地址

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