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发明名称
METHOD FOR STORING TRICHLOROSILANE AND SILICON TETRACHLORIDE
摘要
申请公布号
JPH1120895(A)
申请公布日期
1999.01.26
申请号
JP19980116377
申请日期
1998.04.27
申请人
TOKUYAMA CORP
发明人
ODA HARUYUKI
分类号
B65D90/44;C01B33/03;F17C13/06;H01L21/205;(IPC1-7):B65D90/44
主分类号
B65D90/44
代理机构
代理人
主权项
地址
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