| 发明名称 |
Hot pressed and sintered sputtering target assemblies and method for making same |
| 摘要 |
Described is a hot pressed and sintered sputtering target assembly formed of hot pressed and sintered metal powder diffusion bonded together and to a backing plate by use of an intermediate adhesion layer of titanium or titanium alloy.
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| 申请公布号 |
US5863398(A) |
申请公布日期 |
1999.01.26 |
| 申请号 |
US19960729505 |
申请日期 |
1996.10.11 |
| 申请人 |
JOHNSON MATTHEY ELECTONICS, INC. |
发明人 |
KARDOKUS, JANINE K.;MORALES, DIANA |
| 分类号 |
B22F7/08;C23C14/34;(IPC1-7):B23K20/00 |
主分类号 |
B22F7/08 |
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