DEVICE AND METHOD FOR TURNING SUBSTRATE,申请号JP19980070920-传众专利搜索

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发明名称	DEVICE AND METHOD FOR TURNING SUBSTRATE
摘要
申请公布号	JPH1121668(A)	申请公布日期	1999.01.26
申请号	JP19980070920	申请日期	1998.03.19
申请人	MATERIALS RES CORP;READ RITE CORP	发明人	HURWITT STEVEN;WAGNER ISRAEL;REISS IRA;ZIELINSKI MARIAN;TAN SWIE-IN
分类号	C23C14/34;C23C14/50;H01L21/203;(IPC1-7):C23C14/50	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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