| 摘要 |
PROBLEM TO BE SOLVED: To form an extra-thin, low loss and uniform antifouling film without effecting optical characteristics by a method wherein a thin optical film for specified wavelength region is formed on a board and then is subjected to a vapor phase treatment so as to uniformly form the monomolecular film of a specified silane-based compound. SOLUTION: By forming a reflecting film 2 for the wavelength range of 240-500 nm on a board, an optical member 1 is produced and then optically washed with an excimer lamp (which emits the wavelength of 172 nm) so as to activate its surface. Next, the optically washed optical member 1 is installed on a holder provided in the upper part of an enclosed vessel and a vessel filled with a liquid carbon fluoride silane-based compound is installed underside the optical member 1. Through the chemical reaction between the alkoxy silyl group of carbon fluoride silane and the hydroxyl group of the oxide of the reflecting film 2 formed on the optical member 1, the chemically adsorbed monomolecular film 3 of the carbon fluoride silane is formed over the whole surface of the optical member 1. |
