发明名称 Polymers containing protected styrene and unprotected hydroxbenzyl (meth) acrylamides
摘要 Novel polymers may be used in resist formulations for the fabrication of printing plates and circuit boards and, in particular, for the fabrication of integrated circuits. No autocatalytic decomposition of the compounds occurs and the resist film obtained therewith has good adhesive properties.
申请公布号 US5863701(A) 申请公布日期 1999.01.26
申请号 US19980072541 申请日期 1998.05.05
申请人 OLIN MICROELECTRONIC CHEMICALS, INC. 发明人 MERTESDORF, CARL-LORENZ
分类号 G03F7/039;C08F12/00;C08F212/14;C08F220/58;G03F7/004;H01L21/027;(IPC1-7):G03C1/492 主分类号 G03F7/039
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