| 摘要 |
PROBLEM TO BE SOLVED: To enable purifying a large flow rate of gaseous hydridecontaining harmful gas with high purifying capacity even in the presence of moisture by bringing harmful gas containing gaseous hydride as harmful components into contact with a purifying agent consisting essentially of copper oxide and silver oxide. SOLUTION: A purifying pipe 1 is packed with a purifying agent 2 consisting essentially of copper (II) oxide and silver (I) oxide. Between a cylinder cabinet 4 for housing a gas cylinder 3 and a blower 5 for continuously sucking air in the cylinder cabinet 4 to ventilate it, the purifying pipe 1 is installed through a ventilating duct 6. And when gas which is gaseous hydride such as arsine, phosphine, silane, disilane and trisilane in the gas cylinder 3 leaks from the gas cylinder 3, the blower 5 installed at the poststage of the purifying pipe 1 is switched to large flow rate operation, and harmful gas is led together with a large quantity of air taken in from an air intake 7 to the ventilating duct 6 to purify it in the purifying pipe 1, allowing it to be discharged as gas madeharmless. |
