| 摘要 |
PROBLEM TO BE SOLVED: To form a liquid crystal display element and a solar cell element on a single substrate, make a space exclusively for the solar cell unnecessary, and reduce the number of manufacturing processes and the number of part items. SOLUTION: This liquid crystal display element equipped with a solar cell element comprises a transparent conductive film pattern as the liquid crystal display element which is formed by forming a transparent conductive film 6 pattern on a glass or plastic substrate 1, forming an amorphous silicon film 7 to become the solar cell element on the transparent conductive film pattern by chemical vapor deposition method, forming a resist pattern on the amorphous silicon, etching the amorphous silicon film by dry etching while using the resist pattern as an etching mask, and removing the amorphous silicon film. |
