| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an operation input device for a substrate processor to prevent the failures of a touch panel and a control switch which are caused by the operation inputs applied only to a specific area of the touch panel or a specific control switch. SOLUTION: The operation areas 35, 37, 39 and 41 are secured on a display input screen 31 of a touch panel 21 of an operation input device in order to input the commands such as an alarm stop command, etc. Then it's avoided that at least one of set positions and sizes of areas 35, 37, 39 and 41 is changed based on a prescribed change rule and accordingly the depressing operations are concentrated in a specific area of the screen 31.</p> |
