| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve a method of arranging and installing an X-ray detector for a fluorescent X-ray measurement in an X-ray apparatus which performs an X-ray diffraction measurement and the fluorescent X-ray measurement and to enhance the measuring accuracy of both measurements. SOLUTION: An X-ray apparatus is provided with an X-ray source 1 which radiates X-rays, with an X-ray counter 6 which detects X-rays diffracted by a sample 8, with a semiconductor detector (SSD) 23 which detects fluorescent X-rays generated from the sample 8, with aθ-rotation driving system 9 by which the sample is turned byθwith reference to the X-ray source 1 around a sample axial lineωand with a 2θ-rotation driving system by which the X-ray counter 6 is turned by 2θwith reference to the X-ray source 1 around the sample axial lineω. The SSD 23 is moved so as to be brought close to, or separated from, the sample 8 while it is interlocked with aθ-rotation between the X-ray source 1 and the sample 8 and with a 2θ-rotation between the X-ray source 1 and the X-ray counter 6. In this manner, the SSD 23 is advanced or retreated with reference to an X-ray optical system.</p> |
