发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a test circuit which improves accuracy of a test detecting trouble by measuring supply current in CMOSLSI and facilitates to judge existence of trouble. SOLUTION: This device is provided with a test circuit 21 for detecting trouble on the ground line 26 of an inner circuit 24. In a test mode, when static current flows due to trouble in the inner circuit 24, the test circuit 21 detects it as the change of DC voltage of power wiring, and outputs a signal of DC potential according to the height of this change from a defect detecting terminal 22. Change of power voltage due to minute leak current of the normal inner circuit is restrained by a NMOS transistor N13 provided on the ground line 26.
申请公布号 JPH1114707(A) 申请公布日期 1999.01.22
申请号 JP19970180604 申请日期 1997.06.20
申请人 NEC CORP 发明人 KON HIROKAZU
分类号 G01R31/26;G01R31/28;G06F11/22;H01L21/66;H01L21/822;H01L27/04 主分类号 G01R31/26
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