MANUFACTURE OF THIN FILM PIEZOELECTRIC ELEMENT AND THIN FILM PIEZOELECTRIC ELEMENT AND INK JET TYPE RECORDING HEAD

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin film piezoelectric element, in which a piezoelectric film with excellent piezoelectric characteristics can be selectively formed in a prescribed area by a hydrothermal synthesizing method. SOLUTION: This manufacturing method is constituted of a first process for forming an alkaliproof protecting film 5 at a part except a piezoelectric film formation area on a substrate 1 on which a lower electrode is formed, a second process for forming a seed crystal 6 for forming a piezoelectric film on the substrate 1 on which the protecting film 5 is formed, a third process for removing the protecting film 5 from the substrate 1 on which the seed crystal 6 is formed, and a fourth process for removing the protecting film 5 and crystal-growing the seed crystal 6.