| 摘要 |
PROBLEM TO BE SOLVED: To detect small flaws with high sensitivity and enable effectively quantitative estimation of the flaws, by electronically switching a specific number of ultrasonic vibrator groups performing ultrasonic wave transmitting and receiving operation, one by one sequentially in the arrangement direction of vibrators. SOLUTION: This inspection equipment comprises the following; an arc array type transmitting array probe 1, an arc array type receiving array probe 2, a mechanical system scanner 3 which moves the array probes 1, 2 along the inspected part W of an inspected object Q while maintaining a constant interval between the prove 1 and 2, a circuit part 4 which performs detection of a reflected wave signal and storage in a frame memory, and an image display part 13 which performs real time D scope display of the reflected wave signal stored in the frame memory. By sector-scanning the arc array type array probe, an ultrasonic wave fanned beam of high directivity can be sent to the inspected part, with a wide scanning angle. Thereby diffusion of an ultrasonic wave beam B in the inspected object can be suppressed, and transmitting and receiving sensitivity can be improved. |
