发明名称 DRIVER FOR OSCILLATORY ACTUATOR
摘要 PROBLEM TO BE SOLVED: To facilitate the minute driving or intermittent driving by applying the frequency signal of specified frequency being set to that the relative motion reaches the specified velocity to an electromechanical converting element for drive, and also, changing the specified frequency. SOLUTION: When the circuit (s) of an analog switch 9 is selected by a signal C/S in a condition that the oscillatory frequency in a voltage control transmitter (VOC)2 is set, the oscillatory actuator 1 is driven intermittently. Moreover, when the circuit C of the analog switch 9 is selected, VCO2 oscillates fixed frequency signal regulated with the voltage of a power source E, and the oscillatory actuator 1 is driven at a fixed velocity. In this way, the frequency in the vicinity of the resonance frequency is made a minimum, and the intermittent drive is performed, being swept in some repetition cycle to a frequency higher than this. As a result, intermittent drive or minute drive can be performed easily.
申请公布号 JPH1118455(A) 申请公布日期 1999.01.22
申请号 JP19970170164 申请日期 1997.06.26
申请人 NIKON CORP 发明人 GONDA TSUNEMI
分类号 H02N2/00 主分类号 H02N2/00
代理机构 代理人
主权项
地址