| 摘要 |
PROBLEM TO BE SOLVED: To provide a mounting state inspection method capable of easily and surely inspecting mounting state of electronic parts regardless of a mirror finished upper surface of mounted electronic parts on a substrate. SOLUTION: By the irradiation of laser beam from upward to a point of the height to be measured of an electronic parts mounted on a substrate 4, and the reception of the diffused reflection of the laser beam by a position detecting sensor PDS(position detecting sensor) 17, mounting state of the electronic parts 5 is inspected by determining the height of the position to be measured. In case an upper surface of the electronic parts 5 is mirror finished, the laser beam is totally reflected and a receiving intensity of radiation of the PDS 17 is small, so a measured value of the height of the electronic parts mounted on the substrate 4 is lower than the height of the substrate 4. Applying this fact, if a measuring result shows that the height of the electronic parts mounted on a substrate 4 is lower than the height of the substrate 4, it is concluded that the electronic parts with the mirror finished surface exists at the measured point. |
