| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure a gas concentration by allowing a temperature compensation element to haveα-alumina layer that carries manganese oxide. SOLUTION: A temperature compensation element is obtained by adding a compound including, for example, manganese toα-alumina, by arranging the compound around a metal wire, and further performing heat treatment under the presence of oxygen. The material of the metal wire is determined by considering durability, heat resistance, and price but normally platinum is preferably used. Dimanganese trioxide is formed by heat treatment in air at 530-940 deg.C. A bridge circuit is formed by using the temperature compensation element and a detection element to form a contact combustion type gas sensor. Since no housing is required, costs can be reduced and the sensor can be miniaturized, the sensor can be inspected easily even after the sensor is inserted, the occurrence of a measurement mistake cannot take place easily, and the gas concentration of a target gas can be accurately measured over a long term.
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