| 摘要 |
PROBLEM TO BE SOLVED: To accurately express concave and convex images of a sample surface. SOLUTION: A microscope detects the distance between a probe 2 and a sample 3, performs feedback to a drive means 1 using a piezoelectric element so that the distance becomes constant, thus controlling the probe 2 or the sample 3 in Z direction and at the same time scanning it in XY directions and hence observing the concave and convex images of the sample 3. In this case, the microscope has operation means 12 and 13 for adding the detection signal of the distance between the probe 2 and the sample 3 to the concave/convex signals consisting of a control signal in Z direction and an imaging means 14 for imaging according to a signal being added by the operation means 12 and 13, thus observing the concave/convex images of the sample 3 where the detection signal of the above distance is added.
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