PLASMA GENERATING DEVICE AND ION IMPLANTING DEVICE,申请号JP19970170336-传众专利搜索

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发明名称	PLASMA GENERATING DEVICE AND ION IMPLANTING DEVICE
摘要
申请公布号	JPH1116507(A)	申请公布日期	1999.01.22
申请号	JP19970170336	申请日期	1997.06.26
申请人	TOSHIBA CORP	发明人	YABE KAZUO;SATO MITSUO
分类号	C23C14/48;H01J27/02;H01J27/08;H01J37/08;H01J37/317;H01L21/265;(IPC1-7):H01J27/02	主分类号	C23C14/48
代理机构		代理人
主权项
地址

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