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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH1117033(A)
申请公布日期
1999.01.22
申请号
JP19970164278
申请日期
1997.06.20
申请人
SEIKO EPSON CORP
发明人
MACHIDA YOSHIHIKO
分类号
H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/824
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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