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发明名称
LIQUID MATERIAL VAPORIZING APPARATUS
摘要
申请公布号
JPH1116839(A)
申请公布日期
1999.01.22
申请号
JP19970315071
申请日期
1997.11.17
申请人
SHIMADZU CORP
发明人
ITO SEIJI;YOSHIOKA NAOMI
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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