发明名称 |
SUBSTRATE PROCESSING APPARATUS HAVING A SUBSTRATE TRANSPORT WITH A FRONT END EXTENSION AND AN INTERNAL SUBSTRATE BUFFER |
摘要 |
A substrate processing apparatus (10) having a plurality of substrate processing modules (14) connected to a substrate transport chamber (31). The substrate transport chamber (31) has a housing (13) and a substrate transport mechanism (22). The housing (13) forms a substantially closed main transport chamber (31) with doorways into the main transport chamber for the substrate processing modules (14). The transport mechanism (22) has a substrate holder (29) movably located in the transport chamber (31). The housing (13) includes a front end (28) extension (30) that is connected to load locks (16). The front end (28) extension (30) has an aligner (32), a cooler (36), and a buffer (34) directly connected to the housing (13) and located in the front end (28) extension (30) in part of the main transport chamber (31).
|
申请公布号 |
WO9902752(A1) |
申请公布日期 |
1999.01.21 |
申请号 |
WO1998US11188 |
申请日期 |
1998.06.02 |
申请人 |
BROOKS AUTOMATION, INC. |
发明人 |
BEAULIEU, DAVID, R.;PIPPINS, MICHAEL, W. |
分类号 |
B65G49/07;C23C14/50;C23C14/56;C23C16/44;H01L21/00;H01L21/205;H01L21/677;(IPC1-7):C23C16/00;B08B7/00 |
主分类号 |
B65G49/07 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|