发明名称 |
Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same |
摘要 |
This invention relates to a corrosion-resistant member having a resistance to plasma of a halogen based corrosive gas, which comprises a main body and a corrosion-resistant layer formed on a surface of the main body containing a fluoride of at least one element selected from the group consisting of rare earth elements and alkaline earth elements. |
申请公布号 |
EP0891957(A1) |
申请公布日期 |
1999.01.20 |
申请号 |
EP19980305585 |
申请日期 |
1998.07.14 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
OHASHI, TSUNEAKI;ARAKI, KIYOSHI;SHIMURA, SADANORI;KATSUDA, YUJI |
分类号 |
C04B41/87;C04B41/50;C04B41/52;C04B41/85;C04B41/89;C23C8/36;C23C16/458;H01L21/205;H01L21/302;H01L21/3065 |
主分类号 |
C04B41/87 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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