发明名称 MASS FLOW TRANSDUCER HAVING EXTENDED FLOW RATE MEASUREMENT RANGE
摘要 The transducer (10) has a single laminar flow element (24) in a primary fluid flow path (14) and multiple secondary flow paths (16) in parallel with and in fluid communication with the primary flow path. An electric circuit (18) is coupled to each of the multiple secondary flow paths for measuring the corresponding flow rate in the primary flow path as a function of temperature of the fluid flowing in the secondary flow paths. A circuit (18) is coupled to each of the secondary flow paths includes at least one temperature responsive element (20) in thermal communication with the fluid in the corresponding secondary flow path.
申请公布号 EP0891534(A1) 申请公布日期 1999.01.20
申请号 EP19970917838 申请日期 1997.04.03
申请人 MKS INSTRUMENTS, INC. 发明人 LUCAS, PAUL, D.
分类号 G01F1/68;G01F1/684;G01F5/00;(IPC1-7):G01F1/68 主分类号 G01F1/68
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