| 摘要 |
<p>An angular rate sensor that utilizes the Coriolis effect and which includes two dithered accelerometers having proof masses suspended by a hinge fabricated out of a Silicon substrate, the proof masses are provided with support struts that can be adjusted by applying heat to the struts to compensate for misalignment of the proof masses along the dither axis. In one embodiment, the hinges are located on the same side of the substrate and a vibrating beam force transducers are connected between each of the proof masses and associated accelerometer frames in a push-pull arrangement.</p> |
