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发明名称
摘要
申请公布号
JP2847708(B2)
申请公布日期
1999.01.20
申请号
JP19880126187
申请日期
1988.05.24
申请人
SUMITOMO KINZOKU KOGYO KK
发明人
SAKAMOTO JUNICHI;NAKAYAMA SATORU
分类号
H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H01L21/205
主分类号
H01L21/205
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代理人
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