发明名称 MAGNETRON SOURCE
摘要 FIELD: technique of coatings by spraying of materials from liquid phase. SUBSTANCE: magnetron source has water-cooling magnetic system located in body 1, crucible 3 made of refractory nonmagnetic material, additional source 4 of target molten material connected with hollow of crucible 3 through shutoff member 6 and anode 7. Crucible 3 has also cover made in the form of two plates 9 from refractory nonmagnetic material with through capillary channels 10 extending with their one end to external surface of plates 9, and with the other end, to their internal surface. EFFECT: production of high-quality coatings due to possibility of arrangement of magnetron source above base with simultaneous extension of working cycle duration. 2 cl, 3 dwg
申请公布号 RU2125117(C1) 申请公布日期 1999.01.20
申请号 RU19970103338 申请日期 1997.03.05
申请人 EGOROV OLEG GEORGIEVICH 发明人 EGOROV OLEG GEORGIEVICH
分类号 C23C14/35;(IPC1-7):C23C14/35 主分类号 C23C14/35
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