| 摘要 |
<p>Germanium needles are used as emitter electrodes (12) for use in low particle generating gas ionizers in general and static eliminators in particular. They oxidize with minimal incorporation of nitrogen, and the negative polarity emitters oxidize at a greater rate than the positive polarity emitters. Negative polarity silicon emitters generate several orders of magnitude greater particle emissions than either positive or negative germanium electrodes. The mean particle size is about 0.015 mu m. No particles were shed from these needles. Lowest particle generation is achieved when germanium electrodes are purged with dry air. <IMAGE></p> |
