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发明名称
摘要
申请公布号
JP2847792(B2)
申请公布日期
1999.01.20
申请号
JP19890228133
申请日期
1989.09.01
申请人
DENSOO KK
发明人
SUZUKI YASUTOSHI;AWANO NAOMI;INUZUKA HAJIME
分类号
H01L21/205;H01L21/8222;H01L27/06;H01L27/22;H01L43/06;(IPC1-7):H01L43/06
主分类号
H01L21/205
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